Details
Automated Optical Inspection (AOI)
- Maximum Scanning Range: 200mm (8”) – custom sizes available on request.
- Identification & Sorting Speed:
- 4-inch wafer WPH > = 180 wafers/hour
- 6-inch wafer WPH > = 90 wafers/hour
View more about Automated Optical Inspection (AOI) on main site
